<http://webisa.webdatacommons.org/323508054>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/235951233>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/323508054> .
<http://webisa.webdatacommons.org/323508054>	<http://www.w3.org/ns/prov#value>	"CVD is a process in which a deposition surface is contacted with vapors of volatile chemical compounds, generally at elevated temperatures." .
<http://webisa.webdatacommons.org/323508054>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.ca> .