<http://webisa.webdatacommons.org/324302935>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/412209629>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/324302935> .
<http://webisa.webdatacommons.org/prov/45356747>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/324302935> .
<http://webisa.webdatacommons.org/324302935>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.de> .
<http://webisa.webdatacommons.org/324302935>	<http://www.w3.org/ns/prov#value>	"In the illustrative embodiment, the substrate 12 comprises a semiconductor material such as monocrystalline silicon, germanium, silicon-on-glass, or silicon-on-sapphire." .