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<http://webisa.webdatacommons.org/prov/245850497>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/326037331> .
<http://webisa.webdatacommons.org/326037331>	<http://www.w3.org/ns/prov#value>	"FIG. 21A is a plan view illustrating a manufacturing step of a semiconductor device according to the sixth embodiment of the invention;" .
<http://webisa.webdatacommons.org/326037331>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .