<http://webisa.webdatacommons.org/prov/463932608>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/326091203> .
<http://webisa.webdatacommons.org/326091203>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/326091203>	<http://www.w3.org/ns/prov#value>	"FIG. 4A is a simplified cross sectional view of a wafer processing system including an oscillating brush cleaning assembly and a proximity assembly, in accordance with still another embodiment of the present invention." .
<http://webisa.webdatacommons.org/326091203>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .