<http://webisa.webdatacommons.org/328529697>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/328529697>	<http://www.w3.org/ns/prov#value>	"For example, assume that the target pattern is a line-like pattern designed on the basis of a line width W of 0.13 microns and a pitch P of 0.42 microns." .
<http://webisa.webdatacommons.org/prov/434247448>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/328529697> .
<http://webisa.webdatacommons.org/328529697>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .