<http://webisa.webdatacommons.org/prov/244283720>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/339419854> .
<http://webisa.webdatacommons.org/prov/400100483>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/339419854> .
<http://webisa.webdatacommons.org/prov/152809172>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/339419854> .
<http://webisa.webdatacommons.org/339419854>	<http://www.w3.org/ns/prov#value>	"Nitrides, carbides, oxynitrides, and oxycarbides of metals and semiconductors, such as titanium nitride, silicon nitride, silicon carbide, and silicon oxynitride are popular compositions for capping layers." .
<http://webisa.webdatacommons.org/prov/431582152>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/339419854> .
<http://webisa.webdatacommons.org/prov/340538648>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/339419854> .
<http://webisa.webdatacommons.org/339419854>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/216945701>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/339419854> .
<http://webisa.webdatacommons.org/339419854>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .