<http://webisa.webdatacommons.org/341371303>	<http://www.w3.org/ns/prov#value>	"In one embodiment, the upper layer 90 is a suitable conductive material, such as tungsten, aluminumor polysilicon." .
<http://webisa.webdatacommons.org/prov/57446325>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/341371303> .
<http://webisa.webdatacommons.org/341371303>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<patentgenius.com> .
<http://webisa.webdatacommons.org/341371303>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .