<http://webisa.webdatacommons.org/prov/243819582>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/341462034> .
<http://webisa.webdatacommons.org/prov/242772562>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/341462034> .
<http://webisa.webdatacommons.org/341462034>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/341462034>	<http://www.w3.org/ns/prov#value>	"In one embodiment, a dielectric material such as silicon nitride or silicon dioxide is deposited on the substrate." .
<http://webisa.webdatacommons.org/341462034>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.es> .
<http://webisa.webdatacommons.org/prov/46371073>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/341462034> .
<http://webisa.webdatacommons.org/prov/44841541>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/341462034> .