<http://webisa.webdatacommons.org/341651467> <http://www.w3.org/1999/02/22-rdf-syntax-ns#type> <http://www.w3.org/ns/prov#Entity> . <http://webisa.webdatacommons.org/prov/99851520> <http://www.w3.org/ns/prov#wasDerivedFrom> <http://webisa.webdatacommons.org/341651467> . <http://webisa.webdatacommons.org/341651467> <http://www.w3.org/ns/prov#wasQuotedFrom> <google.co.uk> . <http://webisa.webdatacommons.org/prov/404614572> <http://www.w3.org/ns/prov#wasDerivedFrom> <http://webisa.webdatacommons.org/341651467> . <http://webisa.webdatacommons.org/341651467> <http://www.w3.org/ns/prov#value> "Furthermore, when an ion-implanted layer into which ions of hydrogen, nitrogen or a rare gas such as helium have been implanted is used as the separation layer 101, heat treatment at about 400-600??? C. is applied thereto to effect the separation utilizing a phenomenon in which a fine bubble layer formed by the ion implantation will coagulate." .