<http://webisa.webdatacommons.org/344602677>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.es> .
<http://webisa.webdatacommons.org/344602677>	<http://www.w3.org/ns/prov#value>	"Besides, it is possible to use a disk substrate made of glass, silicon, thermally oxidized silicon, or a metal such as Al and Ti." .
<http://webisa.webdatacommons.org/prov/464635628>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/344602677> .
<http://webisa.webdatacommons.org/344602677>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/464641367>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/344602677> .