<http://webisa.webdatacommons.org/344861341>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<patents.com> .
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<http://webisa.webdatacommons.org/prov/338994320>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/344861341> .
<http://webisa.webdatacommons.org/prov/374720454>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/344861341> .
<http://webisa.webdatacommons.org/344861341>	<http://www.w3.org/ns/prov#value>	"If an underlying layer or structure such as metal is not sensitive to boron diffusion, the diffusion barrier requirement may be" .