<http://webisa.webdatacommons.org/35212304>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/35212304>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/35212304>	<http://www.w3.org/ns/prov#value>	"The processing gas Bby functions as a reducing agent and is selected from the group including H2, B2H6, SiH4 and NH3." .
<http://webisa.webdatacommons.org/prov/464405074>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/35212304> .