<http://webisa.webdatacommons.org/prov/235951233>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/352321282> .
<http://webisa.webdatacommons.org/352321282>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/352321282>	<http://www.w3.org/ns/prov#value>	"However, any suitably Filling process such as CVD, PVD (including high density plasma PVD), electroplating or combinations thereof may be used." .
<http://webisa.webdatacommons.org/352321282>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .