<http://webisa.webdatacommons.org/355221124>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/355221124>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/212085133>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/355221124> .
<http://webisa.webdatacommons.org/prov/108366344>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/355221124> .
<http://webisa.webdatacommons.org/355221124>	<http://www.w3.org/ns/prov#value>	"In recent years, semiconductor devices such as an IC and LSI are highly integrated, and the semiconductor wafer micropatterning technique greatly advances along with this." .