<http://webisa.webdatacommons.org/prov/455181472>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/355845474> .
<http://webisa.webdatacommons.org/prov/62320237>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/355845474> .
<http://webisa.webdatacommons.org/355845474>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/355845474>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/355845474>	<http://www.w3.org/ns/prov#value>	"Next, FIG. 16 schematically illustrates an apparatus for forming a layer of thin film made of material other than metallic material, such as aluminum or the like, by using a mandrel." .