<http://webisa.webdatacommons.org/358724586>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.fr> .
<http://webisa.webdatacommons.org/358724586>	<http://www.w3.org/ns/prov#value>	"FIGS. 2A and 2B are a partial plan view and the cross-sectional view thereof, respectively, for illustrating a step in a thin-film processing method in the prior art example A." .
<http://webisa.webdatacommons.org/prov/450279122>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/358724586> .
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