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<http://webisa.webdatacommons.org/360257662>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com.au> .
<http://webisa.webdatacommons.org/360257662>	<http://www.w3.org/ns/prov#value>	"Another example of release/sacrificial layer 15 is a polymer that is soluble in organic solvents such as xylene, toluene or acetone and that can be deposited by spin casting." .
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