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<http://webisa.webdatacommons.org/361163443>	<http://www.w3.org/ns/prov#value>	"Also, in an alternate embodiment, the silicon substrate 204 can be replaced by another substrate (not shown) comprised of a ceramic material, including but not limited to Al2O3." .
<http://webisa.webdatacommons.org/prov/293719678>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/361163443> .
<http://webisa.webdatacommons.org/361163443>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .