<http://webisa.webdatacommons.org/prov/285759050>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/363872215> .
<http://webisa.webdatacommons.org/363872215>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/363872215>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/363872215>	<http://www.w3.org/ns/prov#value>	"tire exposed surface of the resulting structure including the contact hole to a predetermined thickness, and implanting impurity ions into the polysilicon film." .