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<http://webisa.webdatacommons.org/364858181>	<http://www.w3.org/ns/prov#value>	"For example, a conductive material such as a metallic material is deposited in the contact hole." .
<http://webisa.webdatacommons.org/prov/61168542>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/364858181> .
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<http://webisa.webdatacommons.org/prov/346657761>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/364858181> .