<http://webisa.webdatacommons.org/368234961>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/368234961>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/319189991>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/368234961> .
<http://webisa.webdatacommons.org/368234961>	<http://www.w3.org/ns/prov#value>	"The semiconductor exposure apparatus is synthetically controlled by a minicomputer 202b (VAX corresponding model of DEC, for example), and the operational procedure and various kinds of parameters are stored in a program form or table form in a hard-disk memory 203b." .