<http://webisa.webdatacommons.org/368888261>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/47793099>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/368888261> .
<http://webisa.webdatacommons.org/prov/292035026>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/368888261> .
<http://webisa.webdatacommons.org/368888261>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/368888261>	<http://www.w3.org/ns/prov#value>	"Next, as shown in FIG. 6F, the openings 68A, 70A can be at least partially filled with a conductive material such as a metal or a conductive polymer to form the conductive vias 38A, 40A. This step can also be performed as previously described." .