<http://webisa.webdatacommons.org/369927702>	<http://www.w3.org/ns/prov#value>	"A liner 22 may be needed, which typically is Ta, TaN, Ti, TiN, and other materials." .
<http://webisa.webdatacommons.org/369927702>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/369927702>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/329335380>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/369927702> .
<http://webisa.webdatacommons.org/prov/330439232>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/369927702> .