<http://webisa.webdatacommons.org/371036496>	<http://www.w3.org/ns/prov#value>	"FIG. 4A is a partial cross sectional view of a semiconductor device showing a third step in a method of manufacturing a semiconductor device according to a first embodiment." .
<http://webisa.webdatacommons.org/371036496>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/371036496>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/463932608>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/371036496> .