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<http://webisa.webdatacommons.org/377468074>	<http://www.w3.org/ns/prov#value>	"Polishing fluid, such as slurry or de-ionized water, is delivered to the polishing face 12." .
<http://webisa.webdatacommons.org/prov/117137934>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/377468074> .