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<http://webisa.webdatacommons.org/378448832>	<http://www.w3.org/ns/prov#value>	"In general, the OH group within the quartz substrate is a factor of destabilizing the operation of the semiconductor device fabricated on the substrate and of varying the characteristic of the device." .
<http://webisa.webdatacommons.org/prov/267729477>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/378448832> .