<http://webisa.webdatacommons.org/381536209>	<http://www.w3.org/ns/prov#value>	"FIG. 21A is a plan view showing the stator of the electrostatic actuator." .
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<http://webisa.webdatacommons.org/381536209>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .