<http://webisa.webdatacommons.org/38198834>	<http://www.w3.org/ns/prov#value>	"The processing chamber wall 242 provides a common ground for the system and comprises a conductive material such as aluminum or the like." .
<http://webisa.webdatacommons.org/prov/62320233>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/38198834> .
<http://webisa.webdatacommons.org/38198834>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/455181460>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/38198834> .
<http://webisa.webdatacommons.org/38198834>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .