<http://webisa.webdatacommons.org/382747414>	<http://www.w3.org/ns/prov#value>	"nitions are given. [0049] A lithography device refers to any device that utilizes an image, such as a mask, to transfer a pattern to and optionally into a substrate." .
<http://webisa.webdatacommons.org/382747414>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.es> .
<http://webisa.webdatacommons.org/382747414>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/32077120>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/382747414> .