<http://webisa.webdatacommons.org/prov/45356711>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/385044316> .
<http://webisa.webdatacommons.org/385044316>	<http://www.w3.org/ns/prov#value>	"The method of claim 1, wherein the plurality of mechanical light modulators include at least two additional layers composed of materials other than amorphous silicon." .
<http://webisa.webdatacommons.org/385044316>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.co.uk> .
<http://webisa.webdatacommons.org/385044316>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .