<http://webisa.webdatacommons.org/prov/45356707> <http://www.w3.org/ns/prov#wasDerivedFrom> <http://webisa.webdatacommons.org/387991971> . <http://webisa.webdatacommons.org/387991971> <http://www.w3.org/ns/prov#value> "Further, a reference numeral 316 denotes an interlayer insulating film formed with a single layer of an inorganic material such as silicon oxide, silicon nitride, silicon nitride oxide, aluminum nitride, or aluminum nitride oxide, or a laminated layer thereof." . <http://webisa.webdatacommons.org/387991971> <http://www.w3.org/1999/02/22-rdf-syntax-ns#type> <http://www.w3.org/ns/prov#Entity> . <http://webisa.webdatacommons.org/387991971> <http://www.w3.org/ns/prov#wasQuotedFrom> <google.fr> . <http://webisa.webdatacommons.org/prov/62320268> <http://www.w3.org/ns/prov#wasDerivedFrom> <http://webisa.webdatacommons.org/387991971> .