<http://webisa.webdatacommons.org/387995169> <http://www.w3.org/1999/02/22-rdf-syntax-ns#type> <http://www.w3.org/ns/prov#Entity> . <http://webisa.webdatacommons.org/387995169> <http://www.w3.org/ns/prov#wasQuotedFrom> <google.com> . <http://webisa.webdatacommons.org/prov/219679915> <http://www.w3.org/ns/prov#wasDerivedFrom> <http://webisa.webdatacommons.org/387995169> . <http://webisa.webdatacommons.org/387995169> <http://www.w3.org/ns/prov#value> "Such processes are known as cathodic sputtering or deposition and generally the substrate to be coated is connected as the anode relative to the more negative cathode or target." .