<http://webisa.webdatacommons.org/387995169>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/387995169>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/219679915>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/387995169> .
<http://webisa.webdatacommons.org/387995169>	<http://www.w3.org/ns/prov#value>	"Such processes are known as cathodic sputtering or deposition and generally the substrate to be coated is connected as the anode relative to the more negative cathode or target." .