<http://webisa.webdatacommons.org/391446847>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/prov/299681271>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/391446847> .
<http://webisa.webdatacommons.org/391446847>	<http://www.w3.org/ns/prov#value>	"A first plane-like metal layer includes M contact portions that communicate with the N plane-like metal layers, respectively, where M is an integer greater than one." .
<http://webisa.webdatacommons.org/391446847>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .