<http://webisa.webdatacommons.org/397444915>	<http://www.w3.org/ns/prov#value>	"Through the dicing step of FIGS. 14A-14C, the micro-oscillator of the present embodiment is formed with a shape such as shown in FIG. 15A." .
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<http://webisa.webdatacommons.org/397444915>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<freshpatents.com> .
<http://webisa.webdatacommons.org/prov/468038389>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/397444915> .