<http://webisa.webdatacommons.org/40071065>	<http://www.w3.org/ns/prov#value>	"Note that while a silicon oxide layer was used in this embodiment, metallic materials such as TiN, TiON, TaN, TaO, TaON, WN, W, and Ti can be used as well." .
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<http://webisa.webdatacommons.org/40071065>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com.au> .
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<http://webisa.webdatacommons.org/prov/238473808>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/40071065> .