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<http://webisa.webdatacommons.org/401976899>	<http://www.w3.org/ns/prov#value>	"This invention relates to an improved method and apparatus for processing semiconductor wafers, and more particularly to a method and apparatus directed towards ensuring the accuracy of the process." .
<http://webisa.webdatacommons.org/401976899>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/401976899>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/134443574>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/401976899> .