<http://webisa.webdatacommons.org/prov/387627508>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/401977223> .
<http://webisa.webdatacommons.org/401977223>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/401977223>	<http://www.w3.org/ns/prov#value>	"The other method is a method in which the supporting base member is formed by depositing materials such as polycrystalline silicon or amorphous silicon on the first wafer comparatively more thickly." .
<http://webisa.webdatacommons.org/401977223>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.de> .