<http://webisa.webdatacommons.org/406950050>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/406950050>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/406950050>	<http://www.w3.org/ns/prov#value>	"This invention relates to semiconductor processing methods, including methods of fabricating electronic components such as transistors." .
<http://webisa.webdatacommons.org/prov/387628232>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/406950050> .