<http://webisa.webdatacommons.org/prov/367532984>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/410781012> .
<http://webisa.webdatacommons.org/prov/375389695>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/410781012> .
<http://webisa.webdatacommons.org/410781012>	<http://www.w3.org/ns/prov#value>	"A fixing means such as an electrostatic chuck or clamp is provided to the lower electrode 5 to fix the target object 2 reliably." .
<http://webisa.webdatacommons.org/410781012>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/410781012>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .