<http://webisa.webdatacommons.org/411346710>	<http://www.w3.org/ns/prov#value>	"The peeling layer 101 may be formed of a film which is formed by N2O plasma treatment, in other words, exposing the surface of a metal film to plasma generated from a gas including N2O." .
<http://webisa.webdatacommons.org/prov/280975537>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/411346710> .
<http://webisa.webdatacommons.org/411346710>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/411346710>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .