<http://webisa.webdatacommons.org/412039273>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<freepatentsonline.com> .
<http://webisa.webdatacommons.org/prov/411521803>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/412039273> .
<http://webisa.webdatacommons.org/412039273>	<http://www.w3.org/ns/prov#value>	"The connection structure of claim 3 wherein said diaphragm is an elastic insulating material positioned between said at least one conductive pad on said substrate and said substrate. 5." .
<http://webisa.webdatacommons.org/412039273>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .