<http://webisa.webdatacommons.org/prov/81079343>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/415286102> .
<http://webisa.webdatacommons.org/415286102>	<http://www.w3.org/ns/prov#value>	"Consequently, there is a need for a method and system that permits more accurate defect analysis to be performed in cooperation with semiconductor wafer scanning tools." .
<http://webisa.webdatacommons.org/415286102>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/415286102>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .