<http://webisa.webdatacommons.org/4169927>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/4169927>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/4169927>	<http://www.w3.org/ns/prov#value>	"FIGS. 28a and 28 b are a side cross sectional view and a bottom view of the main substrate 100 shown in FIG. 27a." .
<http://webisa.webdatacommons.org/prov/215670102>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/4169927> .