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<http://webisa.webdatacommons.org/41788145>	<http://www.w3.org/ns/prov#value>	"In either case, semiconductor layer 22 may include a dielectric material, such as silicon dioxide (SiO2), silicon nitride (SixNy), silicon dioxide/silicon nitride (ON), silicon dioxide/silicon nitride/silicon dioxide (ONO), or tetraethylorthosilicate glass (TEOS) based silicon dioxide." .