<http://webisa.webdatacommons.org/420140951>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<faqs.org> .
<http://webisa.webdatacommons.org/420140951>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/420140951>	<http://www.w3.org/ns/prov#value>	"[0003] In manufacturing semiconductor devices such as LSI and super-LSI or" .
<http://webisa.webdatacommons.org/prov/212085133>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/420140951> .