<http://webisa.webdatacommons.org/420177323>	<http://www.w3.org/ns/prov#value>	"An arcuate guide member 25 conforming to the peripheral edge of the wafer W is provided which, together with a stopper member 26, ensures the alignment of the wafer W. The wafer W is placed just on the tweezers in such a state as shown in FIG. 4A at which time it is neither aligned in a correct position nor vacuum-sucked." .
<http://webisa.webdatacommons.org/prov/464150523>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/420177323> .
<http://webisa.webdatacommons.org/420177323>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/420177323>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .