<http://webisa.webdatacommons.org/prov/119954893>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/420282329> .
<http://webisa.webdatacommons.org/420282329>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/420282329>	<http://www.w3.org/ns/prov#value>	"In accordance with one embodiment, the reactor is integrated in the processing tool along with one or more processing stations used to electrochemically deposit a metal layer, such as copper, on the surface of the microelectronic workpiece." .
<http://webisa.webdatacommons.org/420282329>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com.au> .