<http://webisa.webdatacommons.org/422461017>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/141651779>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/422461017> .
<http://webisa.webdatacommons.org/422461017>	<http://www.w3.org/ns/prov#value>	"A data wire made of conductive materials such as Mo or MoW, Cr, Al or Al alloy, and Ta is formed on the ohmic contact layer patterns 55, 56, and 58." .
<http://webisa.webdatacommons.org/422461017>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .