<http://webisa.webdatacommons.org/424983597>	<http://www.w3.org/ns/prov#value>	"A reactive ionic sputtering apparatus comprises, as shown in FIG. 4, a chamber 8 having an inlet 80 to introduce gases such as hydrogen and argon and an outlet 81 for the pumping of gases." .
<http://webisa.webdatacommons.org/prov/349522572>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/424983597> .
<http://webisa.webdatacommons.org/424983597>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/424983597>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<freepatentsonline.com> .
<http://webisa.webdatacommons.org/prov/324463258>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/424983597> .