<http://webisa.webdatacommons.org/427426267>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/137763997>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/427426267> .
<http://webisa.webdatacommons.org/427426267>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/427426267>	<http://www.w3.org/ns/prov#value>	"It is another object of the present invention to provide a method for manufacturing a semiconductor device with a capacitor which is especially suitable for fabricating the capacitor having the above-mentioned improved structure." .